QI’s 10,000-square-foot Nano3 facility—named for its integration of nanoscience, nanoengineering and nanomedicine—is available for use by academic and industry researchers on an hourly fee-for-service basis. Nano3 has served users from more than 180 academic groups and over 110 companies with nano/micro-fabrication needs ranging from research on electronic and optoelectronic materials and devices to emerging, interdisciplinary, and rapidly growing fields, including biomedical and biochemical devices, heterogeneous integrated devices and circuits, and sensor technology.
The facility consists of 7,000 square feet of Class-100 and Class-1000 cleanrooms, surrounded by 3,000 square feet of analytical and design labs for materials characterization. Nano3 instrumentation includes a state-of-the-art electron-beam lithography system with linewidths down to 8 nanometers, which enables major new research in nanomagnetics for data storage, nanophotonics for intra-chip communications, and molecular sensing for biomedical applications. Other advanced equipment includes a nanoimprinting system, a focused ion beam, an atomic-layer deposition system, a laser direct writer, a high resolution transmission electron microscope, atomic force microscopes, field-emission electron microscopes, and much more.
Director:
Professor Yu-Hwa Lo,Electrical and Computer Engineering