NANO3 NANOFABRICATION CLEANROOM FACILITY

Nano3 enables R&D in nanoscience, nanoengineering and nanomedicine. The 10,000-square-foot facility is available for use by academic and industry researchers on a fee-for-service basis. It has served users from more than 180 academic groups and over 110 companies with nano/micro-fabrication needs ranging from research on electronic and optoelectronic materials and devices to emerging, interdisciplinary, and rapidly growing fields, including biomedical and biochemical devices, heterogeneous integrated devices and circuits, and sensor technology. The facility consists of 7,000sf of Class-100 and Class-1000 cleanrooms, surrounded by 3,000sf of analytical and design labs for materials characterization. Nano3 instrumentation includes a state-of-the-art electron-beam lithography system with guaranteed <8nm linewidth resolution, which enables major new research in nanomagnetics for data storage, nanophotonics for intra-chip communications, and tissue engineering for biomedical applications. Other advanced equipment includes a nanoimprinting system, an atomic-layer deposition system, two field-emission electron microscopes, a scanning probe microscope, and more.

Director: Professor Yuhwa Lo, Electrical and Computer Engineering
Contact: Dr. Bernd Fruhberger, Nano3 Manager | Email | (858) 534-4518
Visit Website